http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10265798-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
filingDate | 1998-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_109a9da6ad11e1437dd2e5df2e8ad539 |
publicationDate | 1998-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H10265798-A |
titleOfInvention | Surface treatment composition and substrate surface treatment method using the same |
abstract | PROBLEM TO BE SOLVED: To provide a surface treatment capable of preventing contamination of a substrate surface from a metal impurity from a surface treatment composition when performing a surface treatment of a substrate and stably achieving an extremely clean substrate surface. A composition and a surface treatment method are provided. A surface treatment composition containing a complexing agent as a metal adhesion inhibitor in a liquid medium, wherein the complexing agent is an ethylenediaminephenol derivative represented by the following general formula (1) or a salt thereof. Composition and surface treatment method using the same. Embedded image (Wherein X 1 and X 2 represent a hydroxyl group; Y 1 to Y 8 represent a hydrogen atom, a hydroxyl group, a halogen atom, an alkyl group, or the like; At least one of Y 1 to Y 8 is not a hydrogen atom. Z 1 to Z 4 represent a hydrogen atom, a carboxyl group or a phosphonic acid group. R 1 to R 4 represent a hydrogen atom or an alkyl group. ) |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000171985-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002356464-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003068696-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004031890-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008305900-A |
priorityDate | 1997-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 100.