| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c2b848a1ad4ea7be66836a3245dd6b6e |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 |
| filingDate |
1996-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0bb16b00bce483b202389d10e84ec55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_551041760008604697cd6230e29cac95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a363a4d8d93e307039a8609af176db25 |
| publicationDate |
1998-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1025565-A |
| titleOfInvention |
Method for producing hard thin film and hard thin film |
| abstract |
[PROBLEMS] To provide a method for producing a hard thin film which can be used as a hard material and a super-hard material and which has a high hardness at a high speed and at a low cost, and a hard thin film having a high hardness. A method of manufacturing a hard thin film according to the present invention is a method of manufacturing a hard thin film by an arc ion plating method using a cathode having a carbon source containing at least carbon and a base material. A negative bias voltage is applied to the base material to bring the base material to a negative potential, and 0.1 μm of the carbon evaporating from the carbon source between the cathode and the base material. A protection body is provided to prevent the molten carbon particles having the above particle diameter from depositing on the base material. A hard thin film having a large hardness can be manufactured by this manufacturing method, This hard thin film is excellent as a hard material and a super hard material. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6962751-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010001530-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8288019-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021059552-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008254145-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008102663-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008229781-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008229782-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015096288-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7572200-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002327271-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999604-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011077746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008229780-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011148686-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011074437-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6881475-B2 |
| priorityDate |
1996-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |