http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10253519-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N5-02 |
| filingDate | 1997-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c3732e0844ad07e4ef10818aea80ae4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4f5421c4373b33b591fc61e87720851 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_236529029c062eaa9b95940169977793 |
| publicationDate | 1998-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10253519-A |
| titleOfInvention | Quartz crystal type humidity sensor element using anodic oxide film |
| abstract | (57) [Summary] [PROBLEMS] To provide a high-sensitivity quartz oscillator type humidity sensor element. SOLUTION: The surface of one or both of the electrode metal thin films of the crystal unit composed of the electrode metal thin film-quartz plate-electrode metal thin film is anodized in a non-aqueous chemical solution having a water content of 5% by weight or less. A humidity sensor element with a moisture-sensitive film formed on a thin film surface. |
| priorityDate | 1997-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 70.