http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10252209-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/E04C2-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/E04F13-18 |
| filingDate | 1997-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f615a864065ba3a7bffe629e739dfa1 |
| publicationDate | 1998-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10252209-A |
| titleOfInvention | Building board for clean room and method of manufacturing the same |
| abstract | (57) [Abstract] [Problem] Clear in a semiconductor / IC chip manufacturing factory The atmosphere of the room can be completely static-free, An object of the present invention is to provide a building board material for a clean room capable of safely manufacturing an IC chip without fear of static electricity. A resin coating layer containing a conductive powder is provided on the surface of a foamed vinyl chloride resin plate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018066245-A |
| priorityDate | 1997-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.