http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10239601-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_502be917dd3d6a2fbc4a6ebea3ce0131 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S359-904 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0858 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-198 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate | 1997-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20411e2116e3e9eeb76c8467a618fcce |
| publicationDate | 1998-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10239601-A |
| titleOfInvention | Thin-film optical path adjusting device and method of manufacturing the same |
| abstract | (57) Abstract: A thin-film optical path adjusting device and a method of manufacturing the same are provided. The device includes a substrate having electrical wiring and connection terminals, an actuator formed on an upper portion of the substrate, a support element for supporting an actuator formed between the substrate and the actuator, A reflecting member 195 formed on the actuator and a plurality of posts formed between the actuator and the reflecting member to support the reflecting member, i.e., the first post 175 and the adjacent second and third posts 177 and 180 Supported by This prevents the reflecting member from being warped or tilted downward, so that the tilt angles of the actuators can be made equal. Further, by reducing the length of the reflecting member between the first post and the second post or between the first post and the third post, the inclination angle of the reflecting member can be increased. |
| priorityDate | 1997-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.