http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10237274-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1374dd16777534b65ad4422333245af8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L67-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L67-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D85-86 |
| filingDate | 1997-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed50006de0f841ff1fec15c608348534 |
| publicationDate | 1998-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10237274-A |
| titleOfInvention | Polyester resin composition, silicon wafer carrier comprising the same, and method for producing the same |
| abstract | PROBLEM TO BE SOLVED: To provide a silicon wafer carrier formed of a polyester resin composition, in which the amount of impurities exuding to the surface upon heat treatment is extremely small, and the surface resistivity is 10%. Obtain a silicon wafer carrier having a permanent antistatic property of 12 to 10 11 Ω (measurement voltage 500 V). SOLUTION: (A) 100 parts by weight of a polyester resin having an intrinsic viscosity of 0.6 to 1.20 and (B) 260 31 to 100 parts by weight of a polyetheresteramide having an apparent melt viscosity in the range of 10 to 1000 (Pa · S) at an apparent shear rate of 1000 sec -1 at 100 ° C and 1 to 40 parts by weight of the modified polyolefin (C). It is a resin composition obtained by blending in a range, and has a molded article surface resistivity of 10 12 to 10 11 Ω (measured voltage 500 A silicon wafer carrier comprising a polyester resin composition, which is in the range of V). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011153300-A |
| priorityDate | 1997-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 69.