abstract |
(57) Abstract: A metal complex solution capable of forming a metal oxide film on a substrate by a coating method by a sol-gel method, A method for forming a photosensitive metal complex solution and a patterned metal oxide film. SOLUTION: A metal complex solution comprising a complex of an organic acid salt of a metal and an organic amine or an organic ketone compound dissolved in an organic solvent, and a method comprising adding a photosensitive resin to the solution. A photosensitive metal complex solution and a method for forming a metal oxide film using these solutions. |