| abstract |
(57) [Summary] [Problem] Arsine, phosphine, silane, disilane, A purifying agent and a purifying method capable of purifying a large amount of a harmful gas containing a high concentration of a harmful component at room temperature extremely efficiently when a hydride-based harmful component of trisilane, diborane, hydrogen selenide leaks from a gas cylinder or the like. Develop. A BET specific surface area of 150 meters 2 / g or more manganese dioxide and silver compound, or a BET specific surface area used cleaning agent composed mainly of 150 meters 2 / g or more of manganese dioxide, silver compound and copper oxide. |