http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10233193-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_82fefa5cc011a5a9abb0114e1060aa2d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J63-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J63-08 |
| filingDate | 1997-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2db4caa85edd8ca9a7948599f2c7ed00 |
| publicationDate | 1998-09-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10233193-A |
| titleOfInvention | Electron beam excited excimer lamp |
| abstract | (57) [Summary] [PROBLEMS] In the configuration of a dielectric barrier discharge lamp configured to reduce the influence of electromagnetic noise radio waves, the entire configuration of the dielectric barrier discharge lamp becomes large and handling is inconvenient. In addition, during the operation, it is extremely difficult to irradiate the object to be irradiated with excimer light to synchronize with the measuring instrument side. A discharge vessel, a vacuum region and a rare gas filled region provided adjacent to the inside of the discharge container, an electron beam generating means for generating an electron beam provided in the vacuum region, An electron window 5 provided at one end of the vacuum region for passing electrons generated by the beam generating means, An electron beam-excited excimer lamp including a light window 7 provided at one end of the rare gas filled region was constructed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007522843-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007018769-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1794856-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1794856-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4568183-B2 |
| priorityDate | 1997-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.