http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10221846-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate | 1997-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd92c08229c283a0ed66b9e6f78ce32c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4261329831dc1f799f6b9f48d602ef18 |
| publicationDate | 1998-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10221846-A |
| titleOfInvention | Method for producing photosensitive agent and positive photoresist composition containing this photosensitive agent |
| abstract | PROBLEM TO BE SOLVED: To provide a method for producing a positive photoresist composition excellent in sensitivity and resolution of resist performance, particularly a photosensitive agent having high sensitivity and a large difference in alkali dissolution rate before and after exposure. And a high-resolution positive photoresist composition containing: A methylenetetra-p-cresol is provided. After 1,2-naphthoquinone-2-diazido-5-sulfonyl chloride was subjected to an esterification reaction using dimethylacetamide as a solvent in the presence of triethylenediamine, the reaction solution was poured into an aqueous hydrochloric acid solution, and the resulting precipitate was filtered. Separately, a method for producing a photosensitive agent which is washed with water and dried, and a positive photoresist composition comprising the photosensitive agent and an alkali-soluble resin. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007017987-A |
| priorityDate | 1997-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 46.