http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10221369-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1997-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fea01595104e570182227367371af5e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d2aa7f1d40e513b0cae49472051cd78 |
| publicationDate | 1998-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10221369-A |
| titleOfInvention | Contact probe, method of manufacturing the same, and probe device provided with contact probe |
| abstract | (57) [Summary] [PROBLEMS] To improve the contact accuracy by uniformly aligning the height of each contact pin without polishing the tip of the contact pin and simultaneously contacting the contact pin with the pad. SOLUTION: Since a contact pin 3a is integrally formed by using a mask exposure technique with its tip 3T projecting vertically downward from a main body 3K, the dimensions of each tip 3T are made with high precision and each tip is made. The heights of the portions 3T can be made uniform, eliminating the need for conventional polishing. When the pad is made of, for example, soft gold, the contact probe is disposed in parallel with the pad surface, and only the overdrive is applied, so that the tip 3T removes only the oxide film on the pad surface. Make sure to contact the underlayer. As described above, there is no need to polish the tip of the pin 3a, and there is no need to tilt and arrange the contact probe, and the structure of parts and jigs for incorporating the contact probe is simplified as compared with the related art. Processing becomes easy. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008164575-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7862733-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003043067-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012233723-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008151515-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100939479-B1 |
| priorityDate | 1997-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID482532689 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23985 |
Total number of triples: 22.