http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10207060-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| filingDate | 1997-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_961516b24aac50a4fd1ebe365fcdf2e5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_945033b8af0aaec6cbba046fd1e28e59 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20f6fd73333c52530dd0b90822965895 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ef0cacd9d4c8c83934baf8653b0a6ee |
| publicationDate | 1998-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10207060-A |
| titleOfInvention | Semiconductor device and manufacturing method thereof |
| abstract | PROBLEM TO BE SOLVED: To provide a semiconductor device having an interlayer insulating film or a surface protective film exhibiting excellent photosensitive characteristics and storage stability and having a good opening state, and a method for manufacturing the semiconductor device. SOLUTION: Polyamic acid, a compound having a carbon-carbon double bond capable of being dimerized or polymerized by actinic radiation and an amino group or a quaternized salt thereof, a catechol compound represented by the following general formula (I), A semiconductor device having a coating obtained by applying and curing a photosensitive composition containing a titanocene compound represented by the following general formula (II) as an interlayer insulating film and / or a surface protective film, and a method for producing the same. Example catechol For example, bis (cyclopentadienyl) -bis [2,6 -Difluoro-3- (2- (1H-virol-1-yl) propyl) phenyl] titanium |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004128437-A |
| priorityDate | 1997-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 199.