| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-064
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-4007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-24 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
1997-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b957f074d56e5f1bfb1bdbb58575ef42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5cf10569478e347dfc95ed40e87f4c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_33b7fa8b0007ef8b0dd34c2fd8bbb3ca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72f4912ccaae2639c99fcffa12800a6c |
| publicationDate |
1998-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10206462-A |
| titleOfInvention |
Method of manufacturing probe structure |
| abstract |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a probe structure capable of manufacturing a probe structure having a bump contact with a small variation in height, which can make the pitch of bump contacts finer. is there. SOLUTION: An insulator layer 2 provided with a conductive circuit 3 on any surface or inside thereof and a metal layer (5, 6) are electrically connected to the metal layer (5, 6). A probe by a step of laminating so as to be connected and a step of forming a bump contact 4 by etching the metal layer (5, 6) so that a part of the metal layer (5, 6) remains as the bump contact 4. Structure 1 is manufactured. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-RE41515-E
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6274057-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010038777-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013137243-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0010016-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006250552-A |
| priorityDate |
1997-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |