http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1020487-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C28-00 |
| filingDate | 1996-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7c4e4231d125f3446eef4963f6209a0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aea6c701d448d09776ff5388e3b1a962 |
| publicationDate | 1998-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1020487-A |
| titleOfInvention | Method for forming Pb-containing metal oxide thin film pattern |
| abstract | (57) Abstract: A relatively thick Pb-containing metal oxide thin film pattern is formed by a sol-gel method. SOLUTION: A composition for forming a Pb-containing metal oxide thin film pattern is applied to a substrate to form a plurality of coating films, Prior to forming the upper layer coating on the lower layer coating, the lower layer coating is heated to partially polymerize the hydrolyzable metal compound in the Pb-containing metal oxide thin film pattern forming composition. After that, the image forming exposure, the removal of the unexposed portions, and the heat treatment are performed. Effect The Pb-containing metal oxide thin film pattern forming composition applied to form the upper layer coating film is no longer dissolved in the Pb-containing metal oxide thin film pattern forming composition. It becomes possible to form a coating film having a large film thickness by recoating. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6720211-B2 |
| priorityDate | 1996-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 72.