http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10190074-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ee12a05c7bf51327bc4b4f54e10bc88 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L35-34 |
| filingDate | 1996-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b696994e24156019a04ab336c9f52c4 |
| publicationDate | 1998-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10190074-A |
| titleOfInvention | Method for producing thermoelectric material and method for producing thermoelectric element using the same |
| abstract | (57) [Problem] To provide a thermoelectric material which can easily control doping and has a high production yield by adjusting a crystal form and a crystal grain size. According to the present invention, a gas inlet configured to have a gradually decreasing cross-sectional area, and a throat connected to the gas inlet and configured to have a minimum cross-sectional area over the entire nozzle. A gas injection portion connected to the throat portion, the cross-sectional area gradually increasing with a predetermined spread angle, and configured to have a maximum cross-sectional area, and the gas passing through the nozzle is adiabatically expanded. Supplying a reactive gas containing a raw material element to a gas introduction portion of a supersonic nozzle which constitutes a gas flow path for accelerating so as to be injected at a flow velocity larger than the sonic velocity from the gas injection section, and thermally exciting this. Thus, a step of generating gas radicals, a step of adiabatically expanding the gas radicals and accelerating the gas radicals in a desired direction so as to have a flow velocity larger than the speed of sound, and A step of spraying the thermoelectric material toward the surface, and forming a thermoelectric material on the surface of the substrate by a thermal CVD (chemical vapor deposition) method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114485896-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03087429-A1 |
| priorityDate | 1996-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.