http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10189498-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
| filingDate | 1997-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8bd808fc079d2f74732e1b30f728d11a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6030b5a0c7ea057733dff3f5f640f9b2 |
| publicationDate | 1998-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10189498-A |
| titleOfInvention | Method for manufacturing group 3-5 compound semiconductor chip |
| abstract | (57) Abstract: Provided is a method for manufacturing a Group 3-5 compound semiconductor chip that can suppress the occurrence of damage to a semiconductor crystal in a substrate dividing step and improve the yield. Kind Code: A1 Abstract: A general formula In formed on a sapphire substrate. x Ga y Al z N (x + y + z = 1,0 ≦ x ≦ 1,0 ≦ y ≦ 1, 0 ≦ z ≦ 1) In a method of manufacturing a semiconductor chip by dividing an epitaxial substrate having a stacked structure of a nitride-based group III-V compound semiconductor represented by the following formula: A method for manufacturing a Group 3-5 compound semiconductor chip, comprising: a step of removing a part of a semiconductor to form a split groove exposing a sapphire substrate and scribing the split groove. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009164289-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003031844-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011082432-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005050749-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002151740-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009038407-A |
| priorityDate | 1996-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.