http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10172915-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb5143c5d291d49c700ac1631bdd20df http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_68abc9146443f20b6c1476a700d041bd |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 1996-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_befd9f963cd01aea7e76250e372b790e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8da40cb548e9a940c4b602396bbd9b98 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fc77a9b1e40435ae539001c702a1745 |
| publicationDate | 1998-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10172915-A |
| titleOfInvention | Wafer heat treatment equipment |
| abstract | (57) [Summary] [Problem] To maintain high thermal insulation properties while suppressing the increase in size of the device and the generation of particles while maintaining the uniform temperature. Providing a single wafer processing system that improves processing efficiency. SOLUTION: A heat treatment surface side of a wafer 10 held by a wafer holding portion 22A is formed in a flat flat dome shape, and an outer container 12A made of quartz glass which forms a heat treatment space of the wafer 10 is provided. A heat insulator 20 is provided around an opening at the base of the base 12A, and the inner container 16 has a plurality of openings 16Aa facing the wafer by covering the wafer 10 inside the outer container 12A. A to form a reaction vessel 11A, It is characterized in that the reaction gas on the inner surface of 2A is introduced into the wafer. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006505947-A |
| priorityDate | 1996-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.