http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10168563-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7f278bf3e3bd12896f71fc0e87dd1684 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 |
| filingDate | 1996-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25acc7a2022dadcc52d0a1c251d0f741 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_451563603ce77ccab4729b36e0e7fd79 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d32cfc8ab399225548e8acec9abc718b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b39ad0e0f55fa13c920262a189ce1606 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8e17857e8be845d240404a9ce91f164 |
| publicationDate | 1998-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10168563-A |
| titleOfInvention | Hollow cathode for plasma generation |
| abstract | (57) [Problem] To provide a hollow cathode for plasma generation capable of discharging for 500 hours or more at a discharge current of 400 A. SOLUTION: An opening 44 is provided at the center of the bottom surface as an outer layer. Ta tube 45 having a bottom and La as an inner layer B 6 is a cylindrical body having a two-layer structure consisting of a cylinder 41 and L aB 6 The inner surface area of the cylinder 41 is 8 cm 2 or more, and the thickness is 3 m. The hollow cathode 17 is attached to the tip of the Ta pipe 36 with a length of m or more. |
| priorityDate | 1996-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.