http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10163279-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0a6a69da5879eb83f56f6876dba3e3cf |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1996-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_554787d36105541fd7b1d97b236ec445 |
| publicationDate | 1998-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10163279-A |
| titleOfInvention | Probe card moisture absorption prevention device |
| abstract | PROBLEM TO BE SOLVED: To prevent moisture absorption of a probe card itself by injecting nitrogen and to improve measurement accuracy of a minute current. SOLUTION: Nitrogen is introduced from a nitrogen hose 5 connected to a prober main body 1 and a head plate 2, and nitrogen is injected by a nitrogen injection device 7 equipped with a nitrogen injection port 6 to lower the humidity inside the prober main body 1. Probe card 4 Prevent moisture absorption. As a result, the leakage of the probe card 4 is reduced, and the measurement accuracy of the minute current of the semiconductor device is improved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20030093849-A |
| priorityDate | 1996-12-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 |
Total number of triples: 15.