http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10156627-A

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H5-06
filingDate 1996-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb3d2ba1321af4cf2ffe46ed391f0384
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publicationDate 1998-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H10156627-A
titleOfInvention Electrolytic mirror polishing method for tungsten
abstract (57) [Problem] To make a surface of a work W made of tungsten mirror-polished in a short time and with a simple polishing means. SOLUTION: A work W made of tungsten is applied to a polishing platen 1 on which a polishing pad 3 is stuck while leaving an electrode groove 4. Is pressed, and while the workpiece is relatively moved with respect to the polishing table 1, the electrolytic solution 9 is supplied onto the polishing table 1, and at the same time, an electrolytic current is passed between the work and the polishing table to perform polishing. Free abrasive grains 10 can be mixed in the electrolytic solution 9. This polishing method utilizes a roughness improvement characteristic that the surface roughness of the work is sharply improved with an increase in the current density applied to the work.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001322036-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107891203-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4644954-B2
priorityDate 1996-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 24.