http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10148950-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-0079 |
classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 1996-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2bb22eed810d3208b43d17388371b25a |
publicationDate | 1998-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H10148950-A |
titleOfInvention | Pattern formation method |
abstract | (57) [Problem] To provide a pattern forming method capable of forming a high-definition pattern such as an electrode, a resistor, a dielectric, and the like and a high-precision thick film pattern such as a barrier. SOLUTION: In a first step, a composite sheet including at least a photosensitive resin layer adjacent to the release film is formed between a transfer base sheet and a release film, and in a second step, a predetermined photomask is formed. Exposing the photosensitive resin layer through a third step, and peeling the release film in a third step, thereby removing the photosensitive resin layer together with the release film in a predetermined pattern and developing the resultant. Then, the pattern-formed body is pressure-bonded to the photosensitive resin layer remaining in a predetermined pattern on the composite sheet, and the transfer base sheet is peeled off and fired to form a pattern. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4641898-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001158803-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003029416-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012513624-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010251186-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007057653-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101704587-B1 |
priorityDate | 1996-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 299.