http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10132895-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0120933550ea729b9f3186c3772531b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1996-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_684a28b455f65b6697324dcd63fb3c93 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_71962fd1f10cbf048b0c54f19b0dd9ef |
| publicationDate | 1998-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10132895-A |
| titleOfInvention | Apparatus for inspecting electrical characteristics of semiconductor device and method of manufacturing the same |
| abstract | An object of the present invention is to provide a highly reliable semiconductor device electrical characteristic inspection apparatus in which the heights of pin-type probes are uniform and conduction with electrodes of the semiconductor device is excellent. SOLUTION: In the electrical characteristic inspection device 30 of a semiconductor device 41 in which a plurality of pin-type probes 10 are respectively fixed substantially upright on a plurality of electrodes 21 of a substrate 20 by solder 31, a substrate 20 of the pin-type probe 10 is provided. From the pin-type probe An electrical characteristic inspection device 30 of a semiconductor device 41 adjusted by the thickness of the solder 31 joining the electrode 10 and the electrode 21. [Effect] The height of the pin-type probe from the substrate can be made uniform by the thickness of the solder joining the pin-type probe and the electrode, and therefore, the electrical connection with the electrode (solder ball, etc.) of the semiconductor device can be achieved. Evenness can be achieved and inspection reliability is improved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012137392-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7032307-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180004753-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5060965-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100743587-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007085887-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001153909-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5095604-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021179312-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001099864-A |
| priorityDate | 1996-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578708 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426285897 |
Total number of triples: 25.