| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b3cfdc2686d10506a737643e3e739e39 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S55-38 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-32 |
| filingDate |
1997-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51850a2d4e7b27a177de79660c33d782
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf05b52d83b0c04d751feb7765add6b6 |
| publicationDate |
1998-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10128039-A |
| titleOfInvention |
Method and apparatus for scrubbing an exhaust gas stream |
| abstract |
(57) [Summary] [Problem] To remove harmful exhaust gas from semiconductor device processing [Solution] Exhaust gas flow is passed through a hollow cathode, Scrubbing unwanted substances from the exhaust gas stream. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100506506-B1 |
| priorityDate |
1996-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |