http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10118665-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d97cb748898aa080b013f7f35bc8b434 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D21-01 |
| filingDate | 1996-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb704945dacc84a9a88ef24a4d037819 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_955afdec750855ba73be49e7dcf1507a |
| publicationDate | 1998-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H10118665-A |
| titleOfInvention | Method for treating NH4-based CMP waste liquid |
| abstract | PROBLEM TO BE SOLVED: To process a CMP (Chemical Mechanical Polishing) waste liquid in which SiO 2 fine particles are suspended in an aqueous ammonia solution, and to excel in dehydration and peeling properties, and to prevent the filter cloth from being clogged. To form a floc. SOLUTION: An NH 4 -based CMP waste liquid discharged from a polishing step or the like in a semiconductor manufacturing process is introduced into a first flocculation tank 1, a cationic polymer flocculant 7 is added, and the mixture is rapidly stirred by a stirrer 9 to react. , A first aggregation process is performed. In the second flocculation tank 2, the inorganic flocculant 10 is added, and the mixture is rapidly stirred and reacted by the stirrer 12 to perform the second flocculation treatment. The floc is formed in the floc forming tank 3 by slow stirring by the stirrer 13 to grow the flocs and form large flocs. The separated liquid that has been solid-liquid separated in the sedimentation tank 4 is discharged out of the system as treated water, and the separated sludge is dehydrated by a dehydrator 5. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010227887-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010119956-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001522720-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101290333-B1 |
| priorityDate | 1996-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.