http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10115915-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
filingDate 1996-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8577ccf6cab6fabf86fb6b03893658b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20aebb88e411f2902f1ef69e7fbc9824
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fa294e0d06fc662543460e42ed5c639
publicationDate 1998-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H10115915-A
titleOfInvention Radiation-sensitive resin composition
abstract (57) [Problem] To provide a radiation-sensitive resin composition which has high resolution and high sensitivity, suppresses a standing wave effect, and can obtain a good pattern shape. A radiation-sensitive resin composition containing, for example, a compound represented by the following formula, an alkali-soluble resin, and a 1,2-quinonediazide compound. Embedded image
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8198323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008516954-A
priorityDate 1996-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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