| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b7947c26de6ffc9e68cec72b1f38479 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C22B26-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C02F1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J39-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate |
1996-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa1aea87e0fc5240268cbde8e6897918
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_468d0f7ab206666922dc1c0d4165e779 |
| publicationDate |
1998-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1010755-A |
| titleOfInvention |
Method for removing Na ions from photoresist stripper |
| abstract |
[PROBLEMS] To extremely efficiently lower the Na ion concentration of a photoresist stripping agent. SOLUTION: A photoresist stripping agent consisting of at least one of an alkylamine and a polar organic solvent or containing the liquid as a main component is used as a hydrate of antimony pentoxide Sb 2 O 5 .nH 2 O ( n = 1 to 4) to reduce the Na ion concentration in the photoresist stripping agent. As a processing method, Sb 2 O is used in a photoresist stripping agent. 5 · nH 2 O (n = 1 to 4) is added, or a photoresist stripping agent is brought into contact with Sb 2 O 5 · nH 2 O (n = 1 to 4). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6366036-B1 |
| priorityDate |
1996-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |