| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_385752f237551ca1b257f160a0f2434b |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-46 |
| filingDate |
1996-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a58909ab2bd0fafb83c613519479af35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3cdd9a402bbe55da9ad6adc57161149d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f54597bf61ac5fbee19b50224b42c07
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c34adc35abcd8fca1d7fb2e38fa6c75 |
| publicationDate |
1998-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H1010734-A |
| titleOfInvention |
Radiation-sensitive resin composition |
| abstract |
(57) [Problem] To provide a novel radiation-sensitive resin composition capable of obtaining a cured film having a low dielectric constant and excellent physical properties such as flatness. SOLUTION: (A) A copolymer containing (a-1) an unsaturated carboxylic acid and / or an unsaturated carboxylic anhydride and (a-2) a radical polymerizable compound other than the above as a monomer unit, (B) a crosslinking agent having a monovalent organic group represented by the general formula (1): —CH 2 OR 1 (1) in which R 1 is a hydrogen atom or an alkyl group, and (C) A radiation-sensitive resin composition comprising a radiation-sensitive acid generator, wherein the cured film obtained has a relative dielectric constant of 3.0 or less. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11176750-A |
| priorityDate |
1996-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |