http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1010732-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1996-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fabc19b55859e49b48aab0d8d454c306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fed380359b2dabe87fdf42be66cf1c9f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a54efae1c115dfe927482f2de97b2f7c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ac4d5abe7f097742d5612d14ae3a9a0 |
| publicationDate | 1998-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1010732-A |
| titleOfInvention | Negative photosensitive resin composition and method for producing resist image |
| abstract | PROBLEM TO BE SOLVED: To provide a negative photosensitive resin composition having high sensitivity and high resolution and a method for producing a resist image which is easy to produce a highly integrated circuit. SOLUTION: An alkali aqueous solution-soluble resin, an acid generator, Amino resin and Chemical formula 1 [General formula (I)] Wherein R represents an alkyl group, a and b are each an integer of 1 to 3, and x and y are each 0 to 3 Wherein (a + x) is 4 or less, (b + y) is 4 or less, and when there are a plurality of R, they may be the same or different.] A negative photosensitive resin composition and a resist image comprising applying the negative photosensitive resin composition on a substrate, drying, exposing or irradiating with active radiation, heating, and then developing with an alkaline aqueous solution. Manufacturing method. |
| priorityDate | 1996-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 76.