| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0950e9df7f0e1b73efee1bda859951ad |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 |
| filingDate |
1996-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad450fff31a90fa0566a90a8135a3a21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cea8cb84e04108b66fe4e4f173b79ab2 |
| publicationDate |
1998-04-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H10104813-A |
| titleOfInvention |
Phase shift mask |
| abstract |
(57) [Problem] To provide a phase shift mask without peeling of a halftone film. SOLUTION: A transparent substrate 21 and C on the substrate 21 are provided. In a halftone type phase shift mask including a light-shielding pattern region formed by the r film 22 and a halftone pattern region formed by the halftone film 23, the halftone film 23 in the light-shielding region is formed on the surface of the Cr film 22. A phase shift mask, which is formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1288717-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1288717-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100373317-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014124757-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7179567-B2 |
| priorityDate |
1996-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |