http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1010156-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1996-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e5a241530c559597d587c3ce54edc7d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5efb6f3eecfa3772baa0110152eff8c2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e52869d16acf271be9149d990976055e |
| publicationDate | 1998-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H1010156-A |
| titleOfInvention | Membrane probe and wafer prober equipped with the membrane probe |
| abstract | PROBLEM TO BE SOLVED: To provide a membrane probe capable of obtaining a uniform contact pressure even when a large number of wafers are continuously measured and the wafer thickness varies. A piezoelectric element is arranged on a partial surface of a thin-film probe section. The piezoelectric element 20 is connected to a detection circuit 21 provided in a wafer prober using electric wiring. At the time of measurement, when the bump 3 comes into contact with the pad on the wafer, the thin film probe 2 is movable, so that it slides slightly on the pad by about several μm. At this time, pressure is applied to the piezoelectric element 20 disposed on the surface of the thin film probe 2 according to the minute movement of the thin film probe 2, and a minute electric potential is generated. This minute electric potential is electrically detected by the detection circuit 21, and based on the result, the vertical movement of the stage of the wafer prober can be controlled, and the contact pressure to the object to be measured can be kept uniform. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4684805-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007057439-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100968131-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7847569-B2 |
| priorityDate | 1996-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9357 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450570635 |
Total number of triples: 20.