abstract |
(57) Abstract: A gaseous organic substance is prevented from existing in a clean room, a semiconductor manufacturing apparatus, or the like. SOLUTION: As a dry seal material such as a gasket that is inserted when an air filter is attached to an opening such as a ceiling, a dry seal material that does not generate a gaseous organic substance during use is used. Specifically, it has 1 carbon atoms as a lubricant to be mixed with the raw rubber. A substance which does not contain an aliphatic hydrocarbon of 9 or less (for example, microcrystalline wax) is used. A carboxylic acid ester having a molecular weight of 400 or more is used as a plasticizer, and a phenol compound having a molecular weight of 300 or more is used as an antioxidant. |