http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0987229-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_385752f237551ca1b257f160a0f2434b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C69-83 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C65-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C59-66 |
| filingDate | 1995-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4071af2dc460bef152beb896511b7773 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e978c73728e838b8f570e3b4153d016f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f644c62ce88ccaaab4698b6a17dd581 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e95f35111d8a2d3f9ee66f262cb3d467 |
| publicationDate | 1997-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0987229-A |
| titleOfInvention | Carboxyl group-containing aromatic vinyl compound |
| abstract | (57) [PROBLEMS] To provide a carboxyl group-containing aromatic vinyl monomer useful as a polymerization component of an alkali-soluble resin used in a photoresist which can be developed by an alkali developer, particularly a chemically amplified resist. [Method for solving the problem] The following formula (1): Here, R is the following formula (1) -1 Alternatively, the following formula (1) -2 A carboxyl group-containing aromatic vinyl compound represented by the following formula, wherein R'is a fluorine atom or a trifluoromethyl group, and m is an integer of 0 to 4 and n is 0 or 1. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010108695-A1 |
| priorityDate | 1995-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 85.