| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d813bbaec6727b4b0873efec757cef1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8272dff73f5058ddcb701b7bc96b8d0e |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34 |
| filingDate |
1995-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_140688d55e4b0d4a5e41e56ab6490659
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4a11bfc7362fb5f7981c765dcefdc71 |
| publicationDate |
1997-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0985045-A |
| titleOfInvention |
NF3 exhaust gas abatement method and abatement device |
| abstract |
(57) Abstract: safe, process the NF 3 gas efficiently and at low cost, provides a detoxifying method and abatement apparatus NF 3 gas to harmless so that there is no problem of environmental contamination . Water and ammonia gas are added to a gas containing NF 3 . Heating the mixture under a reducing atmosphere, React to decompose NF 3 into nitrogen and hydrogen fluoride. The produced hydrogen fluoride is neutralized and removed as an ammonium salt. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100428905-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002336649-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2353034-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014046297-A |
| priorityDate |
1995-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |