| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 |
| filingDate |
1995-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_277fed3cb4a9a5475117f21083af82c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27940e91d1e7c81ce0213ee43e215cba |
| publicationDate |
1997-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0982983-A |
| titleOfInvention |
Semiconductor device and method of manufacturing semiconductor device |
| abstract |
(57) Abstract: In a method of manufacturing a semiconductor device, it is an object to thin a diaphragm such as a pressure sensor by controlling an etching amount and a diaphragm thickness. SOLUTION: A step of forming an insulating layer on a semiconductor substrate, a step of forming a semiconductor element on the insulating layer, a step of forming an electronic circuit on the semiconductor substrate or on the insulating layer, and the semiconductor element And a step of electrically connecting the electronic circuit with each other, further comprising: etching the semiconductor substrate from a surface on which the insulating layer is formed to form the semiconductor element. A part of the semiconductor substrate below the insulating layer including a portion where the semiconductor element is formed to form a cavity below the insulating layer including a portion where the semiconductor element is formed. . |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7705416-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002270856-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7907744-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6670257-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010177468-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2006049100-A1 |
| priorityDate |
1995-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |