http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0982677-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D3-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 1995-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_109a9da6ad11e1437dd2e5df2e8ad539 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1171f59314fda6615b27420bc68857dd |
| publicationDate | 1997-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0982677-A |
| titleOfInvention | Surface treatment composition and surface treatment method using the same |
| abstract | (57) [Abstract] [Objective] A surface treatment composition capable of preventing a metal impurity from contaminating a surface treatment composition on a substrate surface and stably achieving an extremely clean substrate surface, and a substrate using the same. The surface treatment method is provided. In a surface treatment composition containing a complexing agent as a metal adhesion preventing agent in a liquid medium, the complexing agent is (A Group) A complexing agent having a cyclic skeleton in its molecular structure and having at least one OH group and / or O − group bonded to a carbon atom constituting the ring (for example, Tyrone, catechol), and (B Group) has at least one oxygen atom as a donor atom in its molecular structure, but does not have a carbonyl group and a carboxyl group, and has at least one donor atom such as a nitrogen atom, a halogen atom, a sulfur atom and a carbon atom. Surface treatment composition comprising at least one complexing agent selected from each group of complexing agents (eg, isopropyl alcohol) selected from each group of complexing agents, and surface treatment of a substrate using the same Method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012131984-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9116590-B2 |
| priorityDate | 1995-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 232.