| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01P7-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
1995-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7c4e4231d125f3446eef4963f6209a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d973e3d33b994124810fdd9d6b00b9cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5aac5662889eb0c0d390e920399bb5d0 |
| publicationDate |
1997-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H0971461-A |
| titleOfInvention |
Method for producing high-purity dielectric thin film |
| abstract |
(57) [Abstract] [Purpose] High-purity MTiO 3 (M) with improved electrical characteristics, especially leak current and dielectric breakdown voltage, by MOCVD method. = Sr and / or Ba) type dielectric thin film is prepared. [Structure] As a source of M metal, a high-purity bis (β-diketonato) Sr or Ba complex or both of which the content of each impurity metal of alkali metal and alkaline earth metal is 1 ppm or less is used. This high-purity volatile complex is purified by recrystallization and ion-exchange chromatography, and contains Sr or Ba nitrate (or acetate) containing 1 ppm or less of each impurity metal of alkali metal and alkaline earth metal. (2) is pyrolyzed to produce high-purity SrO or BaO, which is reduced to a metal by the Thermit method to obtain high-purity Sr or Ba, which is then reacted with β-diketone. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003501360-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8304924-B2 |
| priorityDate |
1995-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |