http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0970825-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28D7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23Q3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1995-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb13728d8e3d88d4ad9e2d83369be22e |
| publicationDate | 1997-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0970825-A |
| titleOfInvention | Semiconductor wafer clamp device |
| abstract | (57) Abstract: A semiconductor wafer can be reliably clamped. A ring-shaped clamp base 31, a coil spring 12, a clamp ring 13, and a clamp ring holding ring 14 are provided. Five recesses 16 are formed at equal intervals along the circumference on the lower surface side of the clamp ring 13, and the base surface 3 of the clamp base 31 is correspondingly formed. A concave portion 33 is formed along the circumference of the groove 2. The coil compression spring 12 connects the clamp ring 13 to the clamp base 3 The recess 16 and the recess 3 when assembled in the recess 17 of No. 1 Fit 3 at the same time. The outer diameter of the winding diameter of the coil compression spring 12 is slightly smaller than the inner diameters of the recesses 16 and 33, The coil compression spring 12 fits into the recess 16 and the recess 33 without play. Accordingly, the positional displacement of the coil compression spring 12 is eliminated, and the positional displacement of the clamp ring 13 is also eliminated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101360012-B1 |
| priorityDate | 1995-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 |
Total number of triples: 18.