http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0967688-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6c8d4dc7bd1a30d8fda907fceaeb4e69 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-02 |
| filingDate | 1995-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_109a9da6ad11e1437dd2e5df2e8ad539 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1171f59314fda6615b27420bc68857dd |
| publicationDate | 1997-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0967688-A |
| titleOfInvention | Substrate surface treatment composition and surface treatment method |
| abstract | (57) 【Description】 [Objective] A surface treatment composition capable of preventing metal contamination from the surface treatment composition to the substrate surface and stably achieving a very clean substrate surface, and a substrate using the same Provide a surface treatment method of SOLUTION: In the surface treatment composition containing a complexing agent as a metal antiadhesive agent in a liquid medium, the complexing agent is (A An annular skeleton in the group) molecular structure, and OH groups attached to a carbon atom constituting the ring and / or O - group of one or more with complexing agents (e.g., Tyrone, catechol), and (B Group) Complexing agents having one or more of donor atoms such as halogen, sulfur or carbon atom in molecular structure (eg, H A surface treatment composition comprising at least one complexing agent selected from each group of F, HCl), and a method of treating a surface of a substrate using the surface treatment composition. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11193374-A |
| priorityDate | 1995-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 234.