http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H096000-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_385752f237551ca1b257f160a0f2434b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1995-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1497b2673ba4d8a841aeafdd50f52ee5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59861c1c7cfb2402bb20b82ac56c5102 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b9874566d3065258bcf91e4e83fa669 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_191522f046bcc0166642306fc84b007f |
| publicationDate | 1997-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H096000-A |
| titleOfInvention | Positive radiation-sensitive resin composition |
| abstract | (57) [Summary] [Purpose] Useful as a resist that effectively responds to various types of radiation, is particularly excellent in focus tolerance, and is also excellent in sensitivity, resolution, developability, heat resistance, and pattern shape. A radioactive resin composition is provided. A positive-type radiation-sensitive resin composition comprising an alkali-soluble phenol resin and a radiation-sensitive compound, wherein the alkali-soluble phenol resin is a condensate of phenols and aldehydes and Phenol resin is a pyrolysis gas chromatograph using a capillary column containing permethylated α-cyclodextrin in a silicone phase, and the pyrolysis temperature is 590 ° C. Detected as a thermal decomposition product when measured by Between the peak area value of 4,6-tetramethylphenol X and the peak area value of m-cresol Y, X / Y ≧ A positive radiation-sensitive resin composition having a relationship of 3.0. |
| priorityDate | 1995-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 373.