| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P2015-0828 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-131 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125 |
| filingDate |
1995-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1997-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H09507965-A |
| titleOfInvention |
Substrate anchor for undercut silicon on insulating microstructure |
| abstract |
(57) Summary An accelerometer is fabricated by forming a proof mass and at least one associated hinge on a silicon substrate. The method includes a bonding and etchback process in which an anchor (646) is formed to bridge the silicon substrate (606) to the oxide support substrate (626), selectively or non-selectively. This polysilicon anchor is grown using a conventional epitaxial process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007081418-A |
| priorityDate |
1994-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |