http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0940682-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3b0a3dbf8d6c9712d86ea1383fd5327 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-28 |
| filingDate | 1995-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5aac5662889eb0c0d390e920399bb5d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eab283fb431023aae0f97b6a1c0df7ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_670fbf340840ebaff8a02449b58cdbcb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7c4e4231d125f3446eef4963f6209a0 |
| publicationDate | 1997-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0940682-A |
| titleOfInvention | High purity Ti complex, method for producing the same, and liquid composition for forming BST film |
| abstract | (57) Abstract: A high-purity Ti complex having a high thermal decomposition temperature is provided. SOLUTION: [TiO (DPM) 2 ] 2 : TiCl 2 Pure water was added to an organic solvent solution of (DPM) 2 and the mixture was adjusted to pH 6.0-8.0 with an alkaline agent to make it cloudy. Then, the organic layer was separated, washed with water, and heated under reflux to [TiO (DPM) 2 ] 2 Get crystals. BS prepared by dissolving this high-purity Ti complex and Ba (DPM) 2 and / or Sr (DPM) 2 in an organic solvent. Liquid composition for T film formation. [Effect] By the CVD method, it is possible to form a TiO film having good step coverage and high purity and excellent electric characteristics. A BST film having a desired film composition can be formed by the solution supply method. |
| priorityDate | 1995-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 47.