| abstract |
(57) [Abstract] [PROBLEMS] To enhance the cooling effect of an electrode with respect to an ozone generation tube incorporated in a gas chamber, and efficiently generate high-concentration ozone. A glass dielectric (11b) is formed on the inner surface of a metal tube (11a). A plurality of sets of ozone generating tubes, each of which is composed of a ground electrode 11 lined with and a hollow cylindrical high-voltage electrode 13 concentrically installed in the ground electrode with a discharge gap 12 therebetween, are incorporated in the body portion 1 and raw materials are provided on both sides thereof. For the gas chamber having the gas inlet 7 and the ozonized gas outlet 8, the pure water is sent to the water jacket 4, which surrounds the ground electrode and is defined in the body, and the high-voltage electrode to directly connect both electrodes. While cooling with water, the raw material gas containing oxygen introduced into the gas chamber is converted to ozone by silent discharge between the electrodes. The discharge gap length is set to 1 mm or less, the specific resistance of pure water is set to 200 kΩcm or more, the flow rate of pure water flowing to the high voltage electrode is set to 20 cm / s or more, and the thickness of the high voltage electrode is set to 2 mm or less. |