http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09312290-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45512
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
classificationIPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
filingDate 1997-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93a528043fb49be4bb51844a3a9aaf09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1495d7a9e49aed48a99ff1f2dcaa6fb2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_665615130d85a4e796fc0231ded5d64c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef8437995115dcbb14449e14ddb5037b
publicationDate 1997-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H09312290-A
titleOfInvention Germanium-doped BPSG thin film layer and method of manufacturing the same
abstract (57) Abstract: A deposition rate of a Ge-BPSG film is increased without forming a film having relatively low stability. Introducing germanium into a processing chamber along with boron, oxygen and silicon, and setting the pressure in the chamber to 100-600 Torr, germanium-doped boron phosphorus silicate glass (Ge-BPSG). Forming a layer.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006219702-A
priorityDate 1996-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3084169
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419545355
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID9009
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426228363
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6535
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8472
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13830
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523132
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524028
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24404
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID9711
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407330845
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559585
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10541
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31215
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426228362
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546339
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530476
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419485362
http://rdf.ncbi.nlm.nih.gov/pubchem/protein/ACCP9WKI7
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16684449
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559478
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8470
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6336889
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5462311
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16684444
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419530477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24823
http://rdf.ncbi.nlm.nih.gov/pubchem/gene/GID100502698
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6326954
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419555680

Total number of triples: 72.