| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1374dd16777534b65ad4422333245af8 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29K67-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29L7-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L67-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C55-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J5-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-00 |
| filingDate |
1996-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ae04d8ea62cee7d6f6beab9bac8f801
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_460dfba00fb310e0fce07f9f6a2c9cbd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f21e655934523c33df73b99f4b6aa3b7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d813ee7f6126df4526e36f26f08ead6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fbc94fb349712035fcfb2b01e2d9d888
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f68a8eb462ca09bf124d78ad8b3ec8df |
| publicationDate |
1997-11-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H09302114-A |
| titleOfInvention |
Polyester film |
| abstract |
(57) Abstract: To provide a polyester film which is used as a support layer of a photoresist film having excellent resolution and excellent substrate followability with respect to a substrate having an uneven shape. A film made of a copolyester containing a lubricant having an average particle size of 2.5 μm or less and having a polymer melting point of 210 to 250 ° C. and having a plane orientation coefficient of 0.09 to 0.16. A polyester film used for a support layer of a photoresist film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4719981-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20000027126-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002221797-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001113593-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100370557-B1 |
| priorityDate |
1996-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |