http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09298222-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e7b522b71fd001f1a633fd8563b2a3e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1996-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36e00698acaa088f125d2b9df7b86ef2 |
| publicationDate | 1997-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09298222-A |
| titleOfInvention | Semiconductor device measuring system and its measuring method |
| abstract | (57) Abstract: The present invention provides a measurement system and method for rapidly and highly accurately measuring a plurality of semiconductor devices on a single silicon wafer having a common potential on the power supply terminal side. The purpose is to Kind Code: A1 A measurement system for applying a voltage to a plurality of devices formed on a single silicon wafer and having a common power supply terminal and a plurality of ground terminals to measure a flowing current value. 2. A measurement system, comprising: a plurality of power supply units 3 for applying a voltage to a plurality of power supply units; and a plurality of measurement means for individually measuring the current value of the device, the other ends of which are independently connected to a plurality of ground potentials. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008529012-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013207016-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005031080-A |
| priorityDate | 1996-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 17.