http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09264895-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d5ebd9bdc11f7a4b267d7e865d5a84f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C99-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-00 |
| filingDate | 1996-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c1bb3845e8bff299e1194795a53798d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68240d42c6bf8bc8556e7262ca96b335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_070522be0f7172cfe8644c364def421b |
| publicationDate | 1997-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09264895-A |
| titleOfInvention | Method for forming probe for scanning tunneling microscope |
| abstract | (57) [Summary] [Object] To provide a method for forming an insulating coating of a probe for a scanning tunneling microscope, which does not peel off even when used for a long time or when a large current is applied, and has good reproducibility of the exposed area of the tip. [Constitution] An anode 2 and a cathode 3 are installed inside a gas reactor 1, and the anode 2 and the cathode 3 are connected to a DC high voltage power source 4. A support 5 is provided on the cathode 3, and a scanning tunneling microscope probe 6 is attached to the support 5 so as to be parallel to the cathode 3. The support 5 is made of an insulating material, and has a scanning tunneling microscope probe 6 and a cathode 3. The probe 6 for the scanning tunneling microscope is placed in the negative glow phase region of the plasma. A reaction gas is introduced into the gas reactor 1, a DC voltage is applied from a DC high voltage power source 4 between the anode 2 and the cathode 3 to generate plasma, and polymer polymerization is performed on the probe 6 for the scanning tunneling microscope. Form a film. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102525421-A |
| priorityDate | 1996-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.