http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09260445-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1996-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b883df27eb786314beafe2b866d6cb99 |
| publicationDate | 1997-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09260445-A |
| titleOfInvention | Heating stage |
| abstract | (57) [Abstract] [Problem] To minimize the shape variation of the stage during heating and cooling. SOLUTION: A disk-shaped ceramic heater 14 that heats a work with a suction hole for sucking the work 1 as a central axis is joined to a central axis of the suction hole of the ceramic heater 14 so as to adsorb the work 1 on the central axis. A heater supporting rod 15 having a hole and a fixing portion on the outer periphery of which is tapered and has a male screw at its tip, and a joining surface of the heater base 3 made of a low thermal expansion material such as quartz glass into which the tapered portion of the heater supporting rod 15 is inserted. An axisymmetric heater seat 16 having a spherical surface centered on the adsorbing surface of the central axis of the adsorbing hole, an axisymmetric heat dissipating fin 17 press-fitted around the heater seat 16, a heater base 3, and a leaf spring 7. A nut 9 fixed to the heater base 3 via a washer 8, an electrode 10 for supplying electric power to the heater, and a ceramic heater 14. And a back cover 12 for forming a vacuum chamber necessary for vacuum-sucking the work 1. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4607445-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012141267-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003059985-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1418456-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005140868-A |
| priorityDate | 1996-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24261 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID457707758 |
Total number of triples: 18.