http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09232398-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C29-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C29-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate | 1996-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cc8d4a3d5de8bf409457f0143fb6fbf1 |
| publicationDate | 1997-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09232398-A |
| titleOfInvention | Ferroelectric film evaluation apparatus and method |
| abstract | (57) [Summary]nPROBLEM TO BE SOLVED: To easily and rapidly perform polarization deterioration test of a ferroelectric film. And the deterioration characteristics of the ferroelectric film can be estimated. A ferroelectric film evaluation apparatus and method thereof are realized.nSOLUTION: Input terminal T 1 , T Two Control signal applied to By transfer gate TG 1 The conduction state, TG Two The non-conduction Set to the state and measurement terminal T Three Apply a constant voltage to An odd number of inverters connected in series and in a ring on a conductor board Generated by the ring oscillator ROSC configured as The generated pulse signal is buffer BUF, transfer gate TG 1 Through the node ND at a predetermined time Two Strong connected to Dielectric capacitor C 1 Control signal after applying to the electrodes of By transfer gate TG 1 To the non-conducting state, transfer gate TG Two To the conductive state, and the ferroelectric capacitor C 1 Stop applying the pulse signal to the measurement terminal T Three And out Force terminal T OUT Through the ferroelectric capacitor C 1 Characteristics of Is measured. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004112248-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6466039-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6114861-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103412210-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7078978-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0101161-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103412210-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100444316-B1 |
| priorityDate | 1996-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7156993 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426135032 |
Total number of triples: 27.