http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09229997-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ecdfc9030125055f06a260938acdacab |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F25D19-006 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F25D19-00 |
| filingDate | 1996-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49edf9c8161533cd4c116a24dc6fb5a4 |
| publicationDate | 1997-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H09229997-A |
| titleOfInvention | Test equipment using refrigerator |
| abstract | (57) [Abstract] [PROBLEMS] In a test apparatus in which a cryogenic test environment is set by using a refrigerator, a test with a prober such as electrical characteristics of a test object is performed in a vibration-free environment. A refrigerator 8 and a balance weight 1 mounted on a floor 17 8 and 8 are connected via a high-strength angle frame 22 to make the refrigerator 8 and the balance weight 18 rigid so that vibration of the refrigerator 8 is prevented as much as possible. An anti-vibration pad 21 is interposed between the bottom surface of the storage table 19 of the balance weight 18 and the floor surface 17. The chamber 4 and the prober actuating device 7 are supported on the upper wall plate 3 supported on the upper surface of the frame 2 supported by the floor surface 17 via a rubber damper 23. An anti-vibration pad 25 is provided between the frame 2 and the floor surface 17. As a result, vibration from the refrigerator 8 as a vibration source is generated in the chamber 4 And the vibration of the refrigerator 8 can be prevented from being directly transmitted to the holder 10 via the cooling head 9 and the heat transfer body. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018507531-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007298506-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8307665-B2 |
| priorityDate | 1996-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23978 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID418354341 |
Total number of triples: 20.