| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_366802749d278c1447279515ff2967f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D7-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C11D11-00 |
| filingDate |
1996-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_858ab42743712f714b9cf300059ba47d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f842a515964d239fe4e9a86147639adb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_986cf6cc37c5be70b0dfbcc99bafe186 |
| publicationDate |
1997-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H09220505-A |
| titleOfInvention |
Method for dissolving a silica-based coating formed on a substrate surface |
| abstract |
(57) Abstract: When the SOG film formed on the surface of the substrate is dissolved and removed from the peripheral edge of the substrate, the film does not rise at the end portion of the SOG film and cracks occur at the end portion of the SOG film. Provided is a film melting method capable of preventing generation of particles due to breakage of a raised portion of an SOG film without causing the occurrence of particles. SOLUTION: Cyclohexanone, γ-butyl lactone, lactic acid is used as a film dissolving liquid that is discharged from a needle-shaped nozzle 16 on the peripheral portion of a rotating substrate W having an SOG film formed on its surface to dissolve and remove the SOG film on the peripheral portion of the substrate. Use ethyl or ethyl pyruvate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6005586-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008183559-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0924754-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0924754-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6033988-A |
| priorityDate |
1996-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |